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		Electronics Division, Electrochemical Society,
		
	
	
		
	
	
	
	
		
	
	
	
	
	
	
	
	
	
		
			
				
				
				
				
					
					
					
					
					
					
						
							
								
								
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												electrochemical society
										
									
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												international symposium on silicon materials science and technology
										
									
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												kapoor, vikram j
										
									
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												huff, howard r
										
									
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												international symposium on ultra large scale integration science and technology
										
									
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												osburn, c. m
										
									
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												rozgonyi, george a
										
									
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												abe, takao
										
									
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												akins, vaughn e
										
									
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												andrews, j. m
										
									
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												co-sponsored by the electronics and the dielectrics & insulation divisions of the electrochemical society; edited by howard r. huff, takao abe
										
									
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